Abstract: For the micro-vibration analysis of the high resolution remote sensing satellite, a structure-control-optics integrated modeling method is adopted. According to the physical relationship, the micro-vibration disturbance model, the structure model of the satellite, the control system model and the optical system model are integrated. As a result, the in-orbit image motion responses of the space camera under a micro-vibration, as well as the transfer characteristics from the disturbance to the image motion can be predicted. With an example of a remote sensing satellite, the image motion responses and the transfer characteristics of the micro-vibration disturbance are analyzed and compared with those obtained by other methods used in engineering. It is demonstrated that the integrated modeling and analysis method is closer to the in-orbit situation in terms of its principle and the prediction of the micro-vibration responses is reasonable. There are some differences between this method and other methods used in engineering, which should be appropriately selected according to the purposes and conditions of the design and the application.