金属遮挡优化型前照式sCMOS传感器在中子辐照下的成像性能

Imaging performance of a metal-shielding-optimized front-side-illuminated scientific CMOS sensor under neutron irradiation

  • 摘要: 针对空间与核辐射环境下高灵敏成像对光学性能与抗辐照能力并重的工程需求,开展了金属遮挡优化型前照式(FSI)科学级CMOS图像传感器在中子辐照下的成像性能试验。采用累积等效1 MeV快中子源,中子注量最高达3.72×1010 n·cm-2。通过统计不同辐照阶段图像灰度均值与方差的变化特征,对器件的成像亮度稳定性与像素响应一致性进行评估。结果表明,在整个辐照注量范围内,图像灰度均值的最大波动<20%,图像方差稳定分布于1.28~1.81区间,未出现明显坏点或功能失效现象。实验结果验证了峰值量子效率为72%的金属遮挡优化型FSI结构在抑制中子位移损伤、保持成像均匀性方面的有效性,表明该类器件在空间成像与核辐射监测等高可靠应用场景中具有良好的工程应用潜力。

     

    Abstract: To meet the engineering requirements for high-sensitivity imaging that demands both high optical performance and radiation robustness in space and nuclear radiation environments, this study experimentally investigates the imaging performance of a metal-shielding-optimized front-side-illuminated (FSI) scientific CMOS image sensor under neutron irradiation. Neutron irradiation experiments were conducted using a fast-neutron source, with a cumulative equivalent 1 MeV neutron fluence of up to 3.72×1010 n·cm-2. The stability of imaging brightness and the uniformity of pixel response were evaluated by statistically analyzing the variation in the mean gray value and variance of images at different irradiation stages. The results show that, throughout the entire irradiation fluence range, the maximum fluctuation of the mean gray value remained below 20%, and the image variance was stable within the range of 1.28 to 1.81. No significant bad pixels or functional failures were observed. These findings demonstrate the effectiveness of the metal-shielding-optimized FSI structure, which has a peak quantum efficiency of 72%, in suppressing neutron-induced displacement damage and maintaining imaging uniformity. This indicates its strong potential for high-reliability applications such as space imaging and nuclear radiation monitoring.

     

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